10-K Filing

ONTO INNOVATION INC. CIK: 704532 FY 2016

Filing Information

Form Type	10-K
Accession Number	`0001564590-17-003258`
Period End Date	20161231
Filing Date	20170303
Fiscal Year	2016
Fiscal Period	FY
XBRL Instance	nano-20161231.xml

Filing Contents

This filing contains the following financial statements:

Balance Sheet 88 Income Statement 78 Cash Flow Statement 93 Stockholders Equity 36 Comprehensive Income 18

Balance Sheet 88 line items

Line Item	Tag	Value	Unit	Period
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$73.00K	USD	Point-in-time
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$150.00K	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$38.15M	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$47.06M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Marketable securities	`MarketableSecuritiesCurrent`	$82.90M	USD	Point-in-time
Marketable securities	`MarketableSecuritiesCurrent`	$44.93M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Accounts receivable, net of allowances of $73 and $150, respectively	`AccountsReceivableNetCurrent`	$39.46M	USD	Point-in-time
Accounts receivable, net of allowances of $73 and $150, respectively	`AccountsReceivableNetCurrent`	$37.83M	USD	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Inventories	`InventoryNet`	$47.75M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories	`InventoryNet`	$38.84M	USD	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$2.86M	USD	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$2.46M	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$5.67M	USD	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	25.07M	shares	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	24.22M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$6.59M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$216.38M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	24.22M	shares	Point-in-time
Total current assets	`AssetsCurrent`	$178.11M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	25.07M	shares	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$44.49M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$44.23M	USD	Point-in-time
Goodwill	`Goodwill`	$10.49M	USD	Point-in-time
Goodwill	`Goodwill`	$8.94M	USD	Point-in-time
Goodwill	`Goodwill`	$9.41M	USD	Point-in-time
Intangible assets, net	`FiniteLivedIntangibleAssetsNet`	$1.87M	USD	Point-in-time
Intangible assets, net	`FiniteLivedIntangibleAssetsNet`	$412.00K	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$17.40M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$1.12M	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$533.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$474.00K	USD	Point-in-time
Total assets	`Assets`	$235.54M	USD	Point-in-time
Total assets	`Assets`	$287.83M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$11.34M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$11.68M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$12.66M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$10.10M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$9.17M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$12.79M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$8.05M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$8.88M	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$813.00K	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$1.77M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$45.21M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$42.03M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$816.00K	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$827.00K	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesNoncurrent`	$775.00K	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesNoncurrent`	$841.00K	USD	Point-in-time
Deferred tax liability	`DeferredTaxLiabilitiesNoncurrent`	$20.00K	USD	Point-in-time
Deferred tax liability	`DeferredTaxLiabilitiesNoncurrent`	$521.00K	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$878.00K	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$353.00K	USD	Point-in-time
Total liabilities	`Liabilities`	$48.21M	USD	Point-in-time
Total liabilities	`Liabilities`	$44.06M	USD	Point-in-time
Commitments and contingencies (Note 11)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Commitments and contingencies (Note 11)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized: 25,070,889 and 24,224,286, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized: 25,070,889 and 24,224,286, respectively, issued and outstanding	`CommonStockValue`	$25.00K	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapitalCommonStock`	$258.71M	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapitalCommonStock`	$271.97M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-66.21M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-22.17M	USD	Point-in-time
Accumulated other comprehensive income	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-2.77M	USD	Point-in-time
Accumulated other comprehensive income	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-5.20M	USD	Point-in-time
Accumulated other comprehensive income	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-6.05M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$179.54M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$243.77M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$207.37M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$187.33M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$235.54M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$287.83M	USD	Point-in-time

Income Statement 78 line items

Line Item	Tag	Value	Unit	Period
Products	`SalesRevenueGoodsNet`	$133.59M	USD	Annual
Products	`SalesRevenueGoodsNet`	$185.07M	USD	Annual
Products	`SalesRevenueGoodsNet`	$146.94M	USD	Annual
Service	`SalesRevenueServicesNet`	$32.85M	USD	Annual
Service	`SalesRevenueServicesNet`	$40.42M	USD	Annual
Service	`SalesRevenueServicesNet`	$36.06M	USD	Annual
Total net revenues	`SalesRevenueNet`	$187.37M	USD	Annual
Total net revenues	`SalesRevenueNet`	$221.13M	USD	Annual
Total net revenues	`SalesRevenueNet`	$166.44M	USD	Annual
Cost of products	`CostOfGoodsSold`	$76.22M	USD	Annual
Cost of products	`CostOfGoodsSold`	$68.81M	USD	Annual
Cost of products	`CostOfGoodsSold`	$85.39M	USD	Annual
Cost of service	`CostOfServices`	$20.16M	USD	Annual
Cost of service	`CostOfServices`	$19.45M	USD	Annual
Cost of service	`CostOfServices`	$19.09M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.72M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.03M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$1.45M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$90.62M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$97.70M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$107.00M	USD	Annual
Gross profit	`GrossProfit`	$114.12M	USD	Annual
Gross profit	`GrossProfit`	$75.82M	USD	Annual
Gross profit	`GrossProfit`	$89.67M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$31.44M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$33.78M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$32.70M	USD	Annual
Selling	`SellingAndMarketingExpense`	$27.03M	USD	Annual
Selling	`SellingAndMarketingExpense`	$28.05M	USD	Annual
Selling	`SellingAndMarketingExpense`	$30.18M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$23.38M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$22.44M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$23.98M	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$114.00K	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$420.00K	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$24.00K	USD	Annual
Restructuring charge	`RestructuringCharges`	-	USD	Annual
Restructuring charge	`RestructuringCharges`	$2.27M	USD	Annual
Restructuring charge	`RestructuringCharges`	$1.38M	USD	Annual
Total operating expenses	`OperatingExpenses`	$87.47M	USD	Annual
Total operating expenses	`OperatingExpenses`	$84.69M	USD	Annual
Total operating expenses	`OperatingExpenses`	$85.03M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$4.97M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$29.09M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$-11.65M	USD	Annual
Interest income	`InvestmentIncomeInterest`	$35.00K	USD	Annual
Interest income	`InvestmentIncomeInterest`	$47.00K	USD	Annual
Interest income	`InvestmentIncomeInterest`	$71.00K	USD	Annual
Interest expense	`InterestExpense`	$289.00K	USD	Annual
Interest expense	`InterestExpense`	$389.00K	USD	Annual
Interest expense	`InterestExpense`	$285.00K	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$813.00K	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$290.00K	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$374.00K	USD	Annual
Total other income (expense), net	`NonoperatingIncomeExpense`	$595.00K	USD	Annual
Total other income (expense), net	`NonoperatingIncomeExpense`	$32.00K	USD	Annual
Total other income (expense), net	`NonoperatingIncomeExpense`	$40.00K	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest`	$29.14M	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest`	$-11.62M	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest`	$5.57M	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$19.50M	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$2.66M	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$-14.90M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$-31.12M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$2.90M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$44.03M	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$0.12	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$-1.30	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$1.79	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$1.75	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$0.12	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$-1.30	USD	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.96M	shares	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.66M	shares	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.06M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	25.15M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	24.38M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.96M	shares	Annual

Cash Flow Statement 93 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-31.12M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$2.90M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$44.03M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$9.77M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$9.07M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$8.29M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$7.67M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$6.75M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$6.25M	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromEquityAwardsOperatingActivities`	$1.04M	USD	Annual
Disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-249.00K	USD	Annual
Disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-1.12M	USD	Annual
Disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-478.00K	USD	Annual
Inventory write-down	`InventoryWriteDown`	$2.90M	USD	Annual
Inventory write-down	`InventoryWriteDown`	$2.65M	USD	Annual
Inventory write-down	`InventoryWriteDown`	$2.11M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$17.91M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$-16.78M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$345.00K	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$-56.00K	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$201.00K	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$-1.18M	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$2.71M	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$-3.86M	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$12.61M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$16.43M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$-4.53M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$7.17M	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-399.00K	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-4.99M	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$943.00K	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-905.00K	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-2.30M	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-3.27M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$1.79M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$4.17M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$2.46M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$1.01M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$-12.86M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$-3.63M	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-212.00K	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-1.93M	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$828.00K	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivitiesContinuingOperations`	$45.69M	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivitiesContinuingOperations`	$-635.00K	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivitiesContinuingOperations`	$1.57M	USD	Annual
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	$5.96M	USD	Annual
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	$3.38M	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$38.77M	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$38.84M	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$41.86M	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$82.86M	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$41.45M	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$41.10M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$4.00M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$1.85M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$5.79M	USD	Annual
Net cash provided by (used in) investing activities	`NetCashProvidedByUsedInInvestingActivitiesContinuingOperations`	$-42.13M	USD	Annual
Net cash provided by (used in) investing activities	`NetCashProvidedByUsedInInvestingActivitiesContinuingOperations`	$-8.05M	USD	Annual
Net cash provided by (used in) investing activities	`NetCashProvidedByUsedInInvestingActivitiesContinuingOperations`	$1.95M	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$315.00K	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$851.00K	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$587.00K	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$8.45M	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$3.97M	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$5.96M	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromEquityAwardsFinancingActivities`	$1.04M	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$702.00K	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$1.82M	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$1.18M	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivitiesContinuingOperations`	$-675.00K	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivitiesContinuingOperations`	$5.27M	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivitiesContinuingOperations`	$220.00K	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-264.00K	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$82.00K	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-726.00K	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-10.09M	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$8.91M	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$3.48M	USD	Annual
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$38.15M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$47.06M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$38.15M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$47.06M	USD	Point-in-time
Cash paid (refund) for income taxes, net	`IncomeTaxesPaidNet`	$861.00K	USD	Annual
Cash paid (refund) for income taxes, net	`IncomeTaxesPaidNet`	$-826.00K	USD	Annual
Cash paid (refund) for income taxes, net	`IncomeTaxesPaidNet`	$3.77M	USD	Annual
Transfer of inventory to property, plant and equipment, net	`PropertyPlantAndEquipmentTransfersAndChanges`	$2.35M	USD	Annual
Transfer of inventory to property, plant and equipment, net	`PropertyPlantAndEquipmentTransfersAndChanges`	$3.27M	USD	Annual
Transfer of inventory to property, plant and equipment, net	`PropertyPlantAndEquipmentTransfersAndChanges`	$1.47M	USD	Annual

Stockholders Equity 36 line items

Line Item	Tag	Value	Unit	Period
Beginning Balance Value	`StockholdersEquity`	$179.54M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$243.77M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$207.37M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$187.33M	USD	Point-in-time
Beginning Balance Shares	`CommonStockSharesIssued`	25.07M	shares	Point-in-time
Beginning Balance Shares	`CommonStockSharesIssued`	24.22M	shares	Point-in-time
Net income (loss)	`NetIncomeLoss`	$-31.12M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$2.90M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$44.03M	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$106.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$17.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$76.00K	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-869.00K	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-2.34M	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-3.24M	USD	Annual
Unrealized gain on investments, net of tax	`OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax`	$-36.00K	USD	Annual
Unrealized gain on investments, net of tax	`OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax`	$-13.00K	USD	Annual
Unrealized gain on investments, net of tax	`OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax`	$42.00K	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$5.25M	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$6.62M	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$2.79M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$7.67M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$6.25M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$6.75M	USD	Annual
Excess tax benefit related to stock options	`AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation`	$1.04M	USD	Annual
Repurchases and retirement of common stock under share repurchase plans	`StockRepurchasedAndRetiredDuringPeriodValue`	$5.34M	USD	Annual
Repurchases and retirement of common stock under share repurchase plans	`StockRepurchasedAndRetiredDuringPeriodValue`	$1.72M	USD	Annual
Repurchases and retirement of common stock under share repurchase plans, Shares	`StockRepurchasedAndRetiredDuringPeriodShares`	0.00	shares	Annual
Repurchases and retirement of common stock under share repurchase plans, Shares	`StockRepurchasedAndRetiredDuringPeriodShares`	111,050.00	shares	Annual
Repurchases and retirement of common stock under share repurchase plans, Shares	`StockRepurchasedAndRetiredDuringPeriodShares`	362,633.00	shares	Annual
Ending Balance Value	`StockholdersEquity`	$179.54M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$243.77M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$207.37M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$187.33M	USD	Point-in-time
Ending Balance Shares	`CommonStockSharesIssued`	25.07M	shares	Point-in-time
Ending Balance Shares	`CommonStockSharesIssued`	24.22M	shares	Point-in-time

Comprehensive Income 18 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-31.12M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$2.90M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$44.03M	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-869.00K	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-2.34M	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-3.24M	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$106.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$17.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$76.00K	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$42.00K	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-13.00K	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-36.00K	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTax`	$-2.43M	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTax`	$-844.00K	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTax`	$-3.38M	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$-34.50M	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$43.19M	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$472.00K	USD	Annual

Data is extracted from SEC EDGAR XBRL filings. Values shown are as reported in the filing.