10-Q Filing

ONTO INNOVATION INC. CIK: 704532 Q3 2015

Filing Information

Form Type	10-Q
Accession Number	`0000704532-15-000038`
Period End Date	20150930
Filing Date	20151030
Fiscal Year	2015
Fiscal Period	Q3
XBRL Instance	nano-20150926.xml

Filing Contents

This filing contains the following financial statements:

Balance Sheet 86 Income Statement 105 Cash Flow Statement 68 Comprehensive Income 20

Balance Sheet 86 line items

Line Item	Tag	Value	Unit	Period
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$253.00K	USD	Point-in-time
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$159.00K	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$41.56M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Marketable securities	`ShortTermInvestments`	$43.06M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Marketable securities	`ShortTermInvestments`	$49.29M	USD	Point-in-time
Accounts receivable, net of allowances of $159 and $253, respectively	`AccountsReceivableNetCurrent`	$26.12M	USD	Point-in-time
Accounts receivable, net of allowances of $159 and $253, respectively	`AccountsReceivableNetCurrent`	$37.57M	USD	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Inventories	`InventoryNet`	$48.40M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories	`InventoryNet`	$35.10M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$1.54M	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$1.91M	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	23.81M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$6.65M	USD	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	24.18M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$9.29M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	23.81M	shares	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	24.18M	shares	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$1.46M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$1.44M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$157.85M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$180.23M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$49.63M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$45.94M	USD	Point-in-time
Goodwill	`Goodwill`	$9.68M	USD	Point-in-time
Goodwill	`Goodwill`	$10.49M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$4.29M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$2.40M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$410.00K	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$385.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$497.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$559.00K	USD	Point-in-time
Total assets	`Assets`	$239.14M	USD	Point-in-time
Total assets	`Assets`	$223.24M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$10.20M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$15.88M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$8.70M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$10.03M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$10.98M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$10.02M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$9.42M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$8.27M	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$1.02M	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$1.24M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$38.20M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$47.55M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$939.00K	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$2.59M	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$701.00K	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$776.00K	USD	Point-in-time
Deferred tax liabilities	`DeferredTaxLiabilitiesNoncurrent`	$926.00K	USD	Point-in-time
Deferred tax liabilities	`DeferredTaxLiabilitiesNoncurrent`	$1.05M	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$1.28M	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$1.02M	USD	Point-in-time
Total liabilities	`Liabilities`	$43.70M	USD	Point-in-time
Total liabilities	`Liabilities`	$51.34M	USD	Point-in-time
Commitments and contingencies (Note 11)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Commitments and contingencies (Note 11)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized: 24,176,806 and 23,813,729, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized: 24,176,806 and 23,813,729, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$251.40M	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$256.88M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-69.11M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-64.40M	USD	Point-in-time
Accumulated other comprehensive income (loss)	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-4.71M	USD	Point-in-time
Accumulated other comprehensive income (loss)	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-2.77M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$187.80M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$179.54M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$239.14M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$223.24M	USD	Point-in-time

Income Statement 105 line items

Line Item	Tag	Value	Unit	Period
Products	`SalesRevenueGoodsNet`	$101.99M	USD	3 Qtrs
Products	`SalesRevenueGoodsNet`	$113.69M	USD	3 Qtrs
Products	`SalesRevenueGoodsNet`	$36.41M	USD	1 Quarter
Products	`SalesRevenueGoodsNet`	$19.49M	USD	1 Quarter
Service	`SalesRevenueServicesNet`	$24.75M	USD	3 Qtrs
Service	`SalesRevenueServicesNet`	$7.65M	USD	1 Quarter
Service	`SalesRevenueServicesNet`	$9.26M	USD	1 Quarter
Service	`SalesRevenueServicesNet`	$30.99M	USD	3 Qtrs
Total net revenues	`SalesRevenueNet`	$27.13M	USD	1 Quarter
Total net revenues	`SalesRevenueNet`	$45.68M	USD	1 Quarter
Total net revenues	`SalesRevenueNet`	$126.74M	USD	3 Qtrs
Total net revenues	`SalesRevenueNet`	$144.68M	USD	3 Qtrs
Cost of products	`CostOfGoodsSold`	$10.74M	USD	1 Quarter
Cost of products	`CostOfGoodsSold`	$59.11M	USD	3 Qtrs
Cost of products	`CostOfGoodsSold`	$52.16M	USD	3 Qtrs
Cost of products	`CostOfGoodsSold`	$19.24M	USD	1 Quarter
Cost of service	`CostOfServices`	$14.06M	USD	3 Qtrs
Cost of service	`CostOfServices`	$3.75M	USD	1 Quarter
Cost of service	`CostOfServices`	$4.29M	USD	1 Quarter
Cost of service	`CostOfServices`	$15.16M	USD	3 Qtrs
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$1.56M	USD	3 Qtrs
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.04M	USD	3 Qtrs
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$688.00K	USD	1 Quarter
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$468.00K	USD	1 Quarter
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$75.82M	USD	3 Qtrs
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$15.72M	USD	1 Quarter
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$68.27M	USD	3 Qtrs
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$23.46M	USD	1 Quarter
Gross profit	`GrossProfit`	$22.22M	USD	1 Quarter
Gross profit	`GrossProfit`	$68.86M	USD	3 Qtrs
Gross profit	`GrossProfit`	$11.42M	USD	1 Quarter
Gross profit	`GrossProfit`	$58.47M	USD	3 Qtrs
Research and development	`ResearchAndDevelopmentExpense`	$24.90M	USD	3 Qtrs
Research and development	`ResearchAndDevelopmentExpense`	$8.04M	USD	1 Quarter
Research and development	`ResearchAndDevelopmentExpense`	$25.72M	USD	3 Qtrs
Research and development	`ResearchAndDevelopmentExpense`	$8.58M	USD	1 Quarter
Selling	`SellingAndMarketingExpense`	$20.44M	USD	3 Qtrs
Selling	`SellingAndMarketingExpense`	$6.39M	USD	1 Quarter
Selling	`SellingAndMarketingExpense`	$20.91M	USD	3 Qtrs
Selling	`SellingAndMarketingExpense`	$6.76M	USD	1 Quarter
General and administrative	`GeneralAndAdministrativeExpense`	$5.59M	USD	1 Quarter
General and administrative	`GeneralAndAdministrativeExpense`	$18.12M	USD	3 Qtrs
General and administrative	`GeneralAndAdministrativeExpense`	$16.90M	USD	3 Qtrs
General and administrative	`GeneralAndAdministrativeExpense`	$5.78M	USD	1 Quarter
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$318.00K	USD	3 Qtrs
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$26.00K	USD	1 Quarter
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$89.00K	USD	3 Qtrs
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$103.00K	USD	1 Quarter
Restructuring charge	`RestructuringCharges`	-	USD	1 Quarter
Restructuring charge	`RestructuringCharges`	$2.30M	USD	Annual
Restructuring charge	`RestructuringCharges`	$1.72M	USD	3 Qtrs
Restructuring charge	`RestructuringCharges`	$56.00K	USD	3 Qtrs
Restructuring charge	`RestructuringCharges`	$1.72M	USD	1 Quarter
Total operating expenses	`OperatingExpenses`	$66.32M	USD	3 Qtrs
Total operating expenses	`OperatingExpenses`	$22.02M	USD	1 Quarter
Total operating expenses	`OperatingExpenses`	$20.95M	USD	1 Quarter
Total operating expenses	`OperatingExpenses`	$62.85M	USD	3 Qtrs
Income (loss) from operations	`OperatingIncomeLoss`	$-10.61M	USD	1 Quarter
Income (loss) from operations	`OperatingIncomeLoss`	$1.26M	USD	1 Quarter
Income (loss) from operations	`OperatingIncomeLoss`	$-7.85M	USD	3 Qtrs
Income (loss) from operations	`OperatingIncomeLoss`	$6.01M	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$37.00K	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$63.00K	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$13.00K	USD	1 Quarter
Interest income	`InvestmentIncomeInterest`	$7.00K	USD	1 Quarter
Interest expense	`InterestExpense`	$286.00K	USD	3 Qtrs
Interest expense	`InterestExpense`	$252.00K	USD	3 Qtrs
Interest expense	`InterestExpense`	$90.00K	USD	1 Quarter
Interest expense	`InterestExpense`	$86.00K	USD	1 Quarter
Other income, net	`OtherNonoperatingIncomeExpense`	$346.00K	USD	1 Quarter
Other income, net	`OtherNonoperatingIncomeExpense`	$-57.00K	USD	1 Quarter
Other income, net	`OtherNonoperatingIncomeExpense`	$740.00K	USD	3 Qtrs
Other income, net	`OtherNonoperatingIncomeExpense`	$111.00K	USD	3 Qtrs
Total other income (expense), net	`OtherIncomeExpenseNet`	$-134.00K	USD	1 Quarter
Total other income (expense), net	`OtherIncomeExpenseNet`	$551.00K	USD	3 Qtrs
Total other income (expense), net	`OtherIncomeExpenseNet`	$267.00K	USD	1 Quarter
Total other income (expense), net	`OtherIncomeExpenseNet`	$-138.00K	USD	3 Qtrs
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$6.57M	USD	3 Qtrs
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-10.74M	USD	1 Quarter
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-7.99M	USD	3 Qtrs
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$1.53M	USD	1 Quarter
Provision for income taxes	`IncomeTaxExpenseBenefit`	$713.00K	USD	1 Quarter
Provision for income taxes	`IncomeTaxExpenseBenefit`	$18.49M	USD	3 Qtrs
Provision for income taxes	`IncomeTaxExpenseBenefit`	$17.92M	USD	1 Quarter
Provision for income taxes	`IncomeTaxExpenseBenefit`	$1.85M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net income (loss)	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$4.72M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$818.00K	USD	1 Quarter
Basic (in dollars per share)	`EarningsPerShareBasic`	$0.03	USD	1 Quarter
Basic (in dollars per share)	`EarningsPerShareBasic`	$0.20	USD	3 Qtrs
Basic (in dollars per share)	`EarningsPerShareBasic`	$-1.11	USD	3 Qtrs
Basic (in dollars per share)	`EarningsPerShareBasic`	$-1.19	USD	1 Quarter
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$0.19	USD	3 Qtrs
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$-1.11	USD	3 Qtrs
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$-1.19	USD	1 Quarter
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$0.03	USD	1 Quarter
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.93M	shares	3 Qtrs
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.13M	shares	1 Quarter
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.01M	shares	3 Qtrs
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.14M	shares	1 Quarter
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.93M	shares	3 Qtrs
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	24.35M	shares	3 Qtrs
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	24.13M	shares	1 Quarter
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	24.35M	shares	1 Quarter

Cash Flow Statement 68 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net income (loss)	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$4.72M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$818.00K	USD	1 Quarter
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$8.66M	USD	3 Qtrs
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$6.83M	USD	3 Qtrs
Stock-based compensation	`ShareBasedCompensation`	$5.12M	USD	3 Qtrs
Stock-based compensation	`ShareBasedCompensation`	$4.66M	USD	3 Qtrs
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-80.00K	USD	3 Qtrs
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-578.00K	USD	3 Qtrs
Provision for doubtful accounts receivable	`ProvisionForDoubtfulAccounts`	-	USD	3 Qtrs
Provision for doubtful accounts receivable	`ProvisionForDoubtfulAccounts`	$11.00K	USD	3 Qtrs
Inventory write-down	`InventoryWriteDown`	$1.11M	USD	3 Qtrs
Inventory write-down	`InventoryWriteDown`	$1.97M	USD	3 Qtrs
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$20.78M	USD	3 Qtrs
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$173.00K	USD	3 Qtrs
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$118.00K	USD	3 Qtrs
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$137.00K	USD	3 Qtrs
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$14.87M	USD	3 Qtrs
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$-4.87M	USD	3 Qtrs
Inventories	`IncreaseDecreaseInInventories`	$15.89M	USD	3 Qtrs
Inventories	`IncreaseDecreaseInInventories`	$8.00M	USD	3 Qtrs
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-370.00K	USD	3 Qtrs
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-6.40M	USD	3 Qtrs
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-1.75M	USD	3 Qtrs
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-4.44M	USD	3 Qtrs
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$9.63M	USD	3 Qtrs
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$-4.54M	USD	3 Qtrs
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$-16.27M	USD	3 Qtrs
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$-688.00K	USD	3 Qtrs
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$295.00K	USD	3 Qtrs
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-3.16M	USD	3 Qtrs
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivities`	$-9.55M	USD	3 Qtrs
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivities`	$2.35M	USD	3 Qtrs
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	-	USD	3 Qtrs
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	$2.88M	USD	3 Qtrs
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$25.57M	USD	3 Qtrs
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$30.28M	USD	3 Qtrs
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$26.81M	USD	3 Qtrs
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$27.30M	USD	3 Qtrs
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$2.80M	USD	3 Qtrs
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$1.36M	USD	3 Qtrs
Net cash provided by (used in) investing activities	`NetCashProvidedByUsedInInvestingActivities`	$4.50M	USD	3 Qtrs
Net cash provided by (used in) investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-4.04M	USD	3 Qtrs
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$470.00K	USD	3 Qtrs
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$614.00K	USD	3 Qtrs
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$3.64M	USD	3 Qtrs
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$5.85M	USD	3 Qtrs
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$664.00K	USD	3 Qtrs
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$1.10M	USD	3 Qtrs
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	-	USD	3 Qtrs
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	$1.72M	USD	3 Qtrs
Net cash provided by financing activities	`NetCashProvidedByUsedInFinancingActivities`	$4.72M	USD	3 Qtrs
Net cash provided by financing activities	`NetCashProvidedByUsedInFinancingActivities`	$203.00K	USD	3 Qtrs
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-166.00K	USD	3 Qtrs
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-269.00K	USD	3 Qtrs
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-9.14M	USD	3 Qtrs
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$6.88M	USD	3 Qtrs
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$41.56M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$34.68M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$41.56M	USD	Point-in-time
Transfer of inventory to property, plant and equipment, net	`PropertyPlantAndEquipmentTransfersAndChanges`	$4.63M	USD	3 Qtrs
Transfer of inventory to property, plant and equipment, net	`PropertyPlantAndEquipmentTransfersAndChanges`	$1.07M	USD	3 Qtrs

Comprehensive Income 20 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net income (loss)	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$4.72M	USD	3 Qtrs
Net income (loss)	`NetIncomeLoss`	$818.00K	USD	1 Quarter
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-1.64M	USD	1 Quarter
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-235.00K	USD	1 Quarter
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-1.98M	USD	3 Qtrs
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-1.25M	USD	3 Qtrs
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-15.00K	USD	1 Quarter
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$17.00K	USD	1 Quarter
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-7.00K	USD	3 Qtrs
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$42.00K	USD	3 Qtrs
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-218.00K	USD	1 Quarter
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-1.94M	USD	3 Qtrs
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-1.65M	USD	1 Quarter
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-1.26M	USD	3 Qtrs
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$-27.74M	USD	3 Qtrs
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$-30.31M	USD	1 Quarter
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$600.00K	USD	1 Quarter
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$2.78M	USD	3 Qtrs

Data is extracted from SEC EDGAR XBRL filings. Values shown are as reported in the filing.