10-Q Filing

ONTO INNOVATION INC. CIK: 704532 Q3 2014

Filing Information

Form Type	10-Q
Accession Number	`0000704532-14-000036`
Period End Date	20140930
Filing Date	20141031
Fiscal Year	2014
Fiscal Period	Q3
XBRL Instance	nano-20140927.xml

Filing Contents

This filing contains the following financial statements:

Balance Sheet 86 Income Statement 104 Cash Flow Statement 73 Comprehensive Income 20

Balance Sheet 86 line items

Line Item	Tag	Value	Unit	Period
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$253.00K	USD	Point-in-time
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$293.00K	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$43.83M	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Marketable securities	`ShortTermInvestments`	$48.75M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Marketable securities	`ShortTermInvestments`	$48.10M	USD	Point-in-time
Accounts receivable, net of allowances of $253 and $293, respectively	`AccountsReceivableNetCurrent`	$26.06M	USD	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Accounts receivable, net of allowances of $253 and $293, respectively	`AccountsReceivableNetCurrent`	$31.44M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories	`InventoryNet`	$35.76M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories	`InventoryNet`	$34.52M	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$6.90M	USD	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$501.00K	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	24.16M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$10.52M	USD	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	23.54M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$9.36M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	23.54M	shares	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	24.16M	shares	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$2.92M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$14.52M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$190.75M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$158.97M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$47.44M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$50.74M	USD	Point-in-time
Goodwill	`Goodwill`	$11.04M	USD	Point-in-time
Goodwill	`Goodwill`	$11.74M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$7.86M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$5.25M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$4.34M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$362.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$593.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$696.00K	USD	Point-in-time
Total assets	`Assets`	$262.83M	USD	Point-in-time
Total assets	`Assets`	$226.96M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$5.95M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$10.60M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$7.85M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$8.39M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$21.75M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$5.94M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$7.99M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$7.83M	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$639.00K	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$758.00K	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$48.96M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$28.76M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$3.25M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$3.72M	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$635.00K	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$1.17M	USD	Point-in-time
Deferred tax liability	`DeferredTaxLiabilitiesNoncurrent`	$2.70M	USD	Point-in-time
Deferred tax liability	`DeferredTaxLiabilitiesNoncurrent`	-	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$1.61M	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$1.67M	USD	Point-in-time
Total liabilities	`Liabilities`	$37.02M	USD	Point-in-time
Total liabilities	`Liabilities`	$55.46M	USD	Point-in-time
Commitments and contingencies (Note 17)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Commitments and contingencies (Note 17)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized; 24,156,554 shares and 23,537,275 shares, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized; 24,156,554 shares and 23,537,275 shares, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$244.73M	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$255.04M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-38.00M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-64.47M	USD	Point-in-time
Accumulated other comprehensive income (loss)	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$-647.00K	USD	Point-in-time
Accumulated other comprehensive income (loss)	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$612.00K	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$189.94M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$207.37M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$226.96M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$262.83M	USD	Point-in-time

Income Statement 104 line items

Line Item	Tag	Value	Unit	Period
Products	`SalesRevenueGoodsNet`	$30.16M	USD	1 Quarter
Products	`SalesRevenueGoodsNet`	$69.78M	USD	3 Qtrs
Products	`SalesRevenueGoodsNet`	$19.49M	USD	1 Quarter
Products	`SalesRevenueGoodsNet`	$101.99M	USD	3 Qtrs
Service	`SalesRevenueServicesNet`	$8.88M	USD	1 Quarter
Service	`SalesRevenueServicesNet`	$24.75M	USD	3 Qtrs
Service	`SalesRevenueServicesNet`	$7.65M	USD	1 Quarter
Service	`SalesRevenueServicesNet`	$28.37M	USD	3 Qtrs
Total net revenues	`SalesRevenueNet`	$27.13M	USD	1 Quarter
Total net revenues	`SalesRevenueNet`	$98.15M	USD	3 Qtrs
Total net revenues	`SalesRevenueNet`	$126.74M	USD	3 Qtrs
Total net revenues	`SalesRevenueNet`	$39.04M	USD	1 Quarter
Cost of products	`CostOfGoodsSold`	$40.91M	USD	3 Qtrs
Cost of products	`CostOfGoodsSold`	$10.74M	USD	1 Quarter
Cost of products	`CostOfGoodsSold`	$52.16M	USD	3 Qtrs
Cost of products	`CostOfGoodsSold`	$18.12M	USD	1 Quarter
Cost of service	`CostOfServices`	$14.06M	USD	3 Qtrs
Cost of service	`CostOfServices`	$4.29M	USD	1 Quarter
Cost of service	`CostOfServices`	$14.51M	USD	3 Qtrs
Cost of service	`CostOfServices`	$4.47M	USD	1 Quarter
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$658.00K	USD	1 Quarter
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$1.96M	USD	3 Qtrs
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$688.00K	USD	1 Quarter
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.04M	USD	3 Qtrs
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$23.24M	USD	1 Quarter
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$57.38M	USD	3 Qtrs
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$15.72M	USD	1 Quarter
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$68.27M	USD	3 Qtrs
Gross profit	`GrossProfit`	$58.47M	USD	3 Qtrs
Gross profit	`GrossProfit`	$15.80M	USD	1 Quarter
Gross profit	`GrossProfit`	$40.77M	USD	3 Qtrs
Gross profit	`GrossProfit`	$11.42M	USD	1 Quarter
Research and development	`ResearchAndDevelopmentExpense`	$25.72M	USD	3 Qtrs
Research and development	`ResearchAndDevelopmentExpense`	$8.04M	USD	1 Quarter
Research and development	`ResearchAndDevelopmentExpense`	$24.70M	USD	3 Qtrs
Research and development	`ResearchAndDevelopmentExpense`	$8.93M	USD	1 Quarter
Selling	`SellingAndMarketingExpense`	$6.76M	USD	1 Quarter
Selling	`SellingAndMarketingExpense`	$6.39M	USD	1 Quarter
Selling	`SellingAndMarketingExpense`	$20.44M	USD	3 Qtrs
Selling	`SellingAndMarketingExpense`	$20.30M	USD	3 Qtrs
General and administrative	`GeneralAndAdministrativeExpense`	$18.12M	USD	3 Qtrs
General and administrative	`GeneralAndAdministrativeExpense`	$5.78M	USD	1 Quarter
General and administrative	`GeneralAndAdministrativeExpense`	$5.42M	USD	1 Quarter
General and administrative	`GeneralAndAdministrativeExpense`	$16.44M	USD	3 Qtrs
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$103.00K	USD	1 Quarter
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$318.00K	USD	3 Qtrs
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$195.00K	USD	1 Quarter
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$588.00K	USD	3 Qtrs
Restructuring charge	`RestructuringCharges`	$1.72M	USD	3 Qtrs
Restructuring charge	`RestructuringCharges`	$1.72M	USD	1 Quarter
Restructuring charge	`RestructuringCharges`	$1.74M	USD	3 Qtrs
Restructuring charge	`RestructuringCharges`	$1.74M	USD	1 Quarter
Total operating expenses	`OperatingExpenses`	$66.32M	USD	3 Qtrs
Total operating expenses	`OperatingExpenses`	$22.02M	USD	1 Quarter
Total operating expenses	`OperatingExpenses`	$63.77M	USD	3 Qtrs
Total operating expenses	`OperatingExpenses`	$23.04M	USD	1 Quarter
Loss from operations	`OperatingIncomeLoss`	$-7.24M	USD	1 Quarter
Loss from operations	`OperatingIncomeLoss`	$-23.00M	USD	3 Qtrs
Loss from operations	`OperatingIncomeLoss`	$-10.61M	USD	1 Quarter
Loss from operations	`OperatingIncomeLoss`	$-7.85M	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$37.00K	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$7.00K	USD	1 Quarter
Interest income	`InvestmentIncomeInterest`	$51.00K	USD	3 Qtrs
Interest income	`InvestmentIncomeInterest`	$13.00K	USD	1 Quarter
Interest expense	`InterestExpense`	$118.00K	USD	1 Quarter
Interest expense	`InterestExpense`	$549.00K	USD	3 Qtrs
Interest expense	`InterestExpense`	$90.00K	USD	1 Quarter
Interest expense	`InterestExpense`	$286.00K	USD	3 Qtrs
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$111.00K	USD	3 Qtrs
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$-334.00K	USD	1 Quarter
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$-930.00K	USD	3 Qtrs
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$-57.00K	USD	1 Quarter
Total other expense, net	`OtherIncomeExpenseNet`	$-445.00K	USD	1 Quarter
Total other expense, net	`OtherIncomeExpenseNet`	$-1.43M	USD	3 Qtrs
Total other expense, net	`OtherIncomeExpenseNet`	$-134.00K	USD	1 Quarter
Total other expense, net	`OtherIncomeExpenseNet`	$-138.00K	USD	3 Qtrs
Loss before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-10.74M	USD	1 Quarter
Loss before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-7.69M	USD	1 Quarter
Loss before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-7.99M	USD	3 Qtrs
Loss before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-24.43M	USD	3 Qtrs
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$18.49M	USD	3 Qtrs
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$-9.73M	USD	3 Qtrs
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$-3.13M	USD	1 Quarter
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$17.92M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-4.55M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-14.70M	USD	3 Qtrs
Net loss	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Basic (dollars per share)	`EarningsPerShareBasic`	$-1.19	USD	1 Quarter
Basic (dollars per share)	`EarningsPerShareBasic`	$-0.63	USD	3 Qtrs
Basic (dollars per share)	`EarningsPerShareBasic`	$-0.20	USD	1 Quarter
Basic (dollars per share)	`EarningsPerShareBasic`	$-1.11	USD	3 Qtrs
Diluted (dollars per share)	`EarningsPerShareDiluted`	$-0.20	USD	1 Quarter
Diluted (dollars per share)	`EarningsPerShareDiluted`	$-1.19	USD	1 Quarter
Diluted (dollars per share)	`EarningsPerShareDiluted`	$-0.63	USD	3 Qtrs
Diluted (dollars per share)	`EarningsPerShareDiluted`	$-1.11	USD	3 Qtrs
Basic (shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.26M	shares	1 Quarter
Basic (shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	24.13M	shares	1 Quarter
Basic (shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.93M	shares	3 Qtrs
Basic (shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.25M	shares	3 Qtrs
Diluted (shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	24.13M	shares	1 Quarter
Diluted (shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.25M	shares	3 Qtrs
Diluted (shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.26M	shares	1 Quarter
Diluted (shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.93M	shares	3 Qtrs

Cash Flow Statement 73 line items

Line Item	Tag	Value	Unit	Period
Net loss	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-4.55M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-14.70M	USD	3 Qtrs
Net loss	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$6.54M	USD	3 Qtrs
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$8.66M	USD	3 Qtrs
Stock-based compensation	`ShareBasedCompensation`	$5.12M	USD	3 Qtrs
Stock-based compensation	`ShareBasedCompensation`	$5.91M	USD	3 Qtrs
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationOperatingActivities`	$-467.00K	USD	3 Qtrs
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationOperatingActivities`	-	USD	3 Qtrs
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-173.00K	USD	3 Qtrs
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-80.00K	USD	3 Qtrs
Provision for doubtful accounts receivable	`ProvisionForDoubtfulAccounts`	$11.00K	USD	3 Qtrs
Provision for doubtful accounts receivable	`ProvisionForDoubtfulAccounts`	-	USD	3 Qtrs
Inventory write-down	`InventoryWriteDown`	$1.11M	USD	3 Qtrs
Inventory write-down	`InventoryWriteDown`	$6.31M	USD	3 Qtrs
Deferred income taxes	`DeferredIncomeTaxExpenseBenefit`	$-9.66M	USD	3 Qtrs
Deferred income taxes	`DeferredIncomeTaxExpenseBenefit`	$20.78M	USD	3 Qtrs
Changes in fair value of contingent consideration	`ChangesInFairValueOfContingentPayments`	$118.00K	USD	3 Qtrs
Changes in fair value of contingent consideration	`ChangesInFairValueOfContingentPayments`	$1.04M	USD	3 Qtrs
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$-4.87M	USD	3 Qtrs
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$1.82M	USD	3 Qtrs
Inventories	`IncreaseDecreaseInInventories`	$8.00M	USD	3 Qtrs
Inventories	`IncreaseDecreaseInInventories`	$7.17M	USD	3 Qtrs
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$300.00K	USD	3 Qtrs
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-6.40M	USD	3 Qtrs
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-1.75M	USD	3 Qtrs
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-820.00K	USD	3 Qtrs
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$6.80M	USD	3 Qtrs
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$-4.54M	USD	3 Qtrs
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$-16.27M	USD	3 Qtrs
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$2.04M	USD	3 Qtrs
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-363.00K	USD	3 Qtrs
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-3.16M	USD	3 Qtrs
Net cash used in operating activities	`NetCashProvidedByUsedInOperatingActivities`	$-9.55M	USD	3 Qtrs
Net cash used in operating activities	`NetCashProvidedByUsedInOperatingActivities`	$-3.91M	USD	3 Qtrs
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$25.57M	USD	3 Qtrs
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$38.03M	USD	3 Qtrs
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$40.80M	USD	3 Qtrs
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$26.81M	USD	3 Qtrs
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$3.52M	USD	3 Qtrs
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$2.80M	USD	3 Qtrs
Net cash used in investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-4.04M	USD	3 Qtrs
Net cash used in investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-6.28M	USD	3 Qtrs
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$735.00K	USD	3 Qtrs
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$470.00K	USD	3 Qtrs
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$4.80M	USD	Point-in-time
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$5.22M	USD	3 Qtrs
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	-	USD	3 Qtrs
Proceeds from sale of shares under employee stock option and purchase plans	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$5.85M	USD	3 Qtrs
Proceeds from sale of shares under employee stock option and purchase plans	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$3.19M	USD	3 Qtrs
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationFinancingActivities`	$-467.00K	USD	3 Qtrs
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationFinancingActivities`	-	USD	3 Qtrs
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$86.00K	USD	3 Qtrs
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$664.00K	USD	3 Qtrs
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	-	USD	3 Qtrs
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	$5.00M	USD	3 Qtrs
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivities`	$4.72M	USD	3 Qtrs
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivities`	$-8.32M	USD	3 Qtrs
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-269.00K	USD	3 Qtrs
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-566.00K	USD	3 Qtrs
Net decrease in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-9.14M	USD	3 Qtrs
Net decrease in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-19.08M	USD	3 Qtrs
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$43.83M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$35.62M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$43.83M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Transfer of inventory to property, plant and equipment, net	`TransfertoPropertyPlantandEquipment`	$3.11M	USD	3 Qtrs
Transfer of inventory to property, plant and equipment, net	`TransfertoPropertyPlantandEquipment`	$4.63M	USD	3 Qtrs

Comprehensive Income 20 line items

Line Item	Tag	Value	Unit	Period
Net loss	`NetIncomeLoss`	$-28.66M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-4.55M	USD	1 Quarter
Net loss	`NetIncomeLoss`	$-14.70M	USD	3 Qtrs
Net loss	`NetIncomeLoss`	$-26.48M	USD	3 Qtrs
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-1.64M	USD	1 Quarter
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-1.25M	USD	3 Qtrs
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-837.00K	USD	3 Qtrs
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$1.14M	USD	1 Quarter
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-7.00K	USD	3 Qtrs
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$20.00K	USD	1 Quarter
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-15.00K	USD	1 Quarter
Net change on unrealized gains on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$17.00K	USD	3 Qtrs
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-1.65M	USD	1 Quarter
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-820.00K	USD	3 Qtrs
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-1.26M	USD	3 Qtrs
Other comprehensive income (loss)	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$1.16M	USD	1 Quarter
Comprehensive loss	`ComprehensiveIncomeNetOfTax`	$-3.39M	USD	1 Quarter
Comprehensive loss	`ComprehensiveIncomeNetOfTax`	$-15.52M	USD	3 Qtrs
Comprehensive loss	`ComprehensiveIncomeNetOfTax`	$-27.74M	USD	3 Qtrs
Comprehensive loss	`ComprehensiveIncomeNetOfTax`	$-30.31M	USD	1 Quarter

Data is extracted from SEC EDGAR XBRL filings. Values shown are as reported in the filing.