10-K Filing

ONTO INNOVATION INC. CIK: 704532 FY 2013

Filing Information

Form Type	10-K
Accession Number	`0000704532-14-000005`
Period End Date	20131231
Filing Date	20140307
Fiscal Year	2013
Fiscal Period	FY
XBRL Instance	nano-20131228.xml

Filing Contents

This filing contains the following financial statements:

Balance Sheet 90 Income Statement 82 Cash Flow Statement 111 Stockholders Equity 34 Comprehensive Income 18

Balance Sheet 90 line items

Line Item	Tag	Value	Unit	Period
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$293.00K	USD	Point-in-time
Allowances for doubtful accounts	`AllowanceForDoubtfulAccountsReceivableCurrent`	$82.00K	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Preferred stock, par value (in dollars per share)	`PreferredStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$97.70M	USD	Point-in-time
Preferred stock, shares authorized	`PreferredStockSharesAuthorized`	3.00M	shares	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$66.46M	USD	Point-in-time
Cash and cash equivalents	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Preferred stock, shares issued	`PreferredStockSharesIssued`	0.00	shares	Point-in-time
Marketable securities	`ShortTermInvestments`	$48.10M	USD	Point-in-time
Marketable securities	`ShortTermInvestments`	$46.99M	USD	Point-in-time
Accounts receivable, net of allowances of $293 and $82, respectively	`AccountsReceivableNetCurrent`	$31.44M	USD	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Accounts receivable, net of allowances of $293 and $82, respectively	`AccountsReceivableNetCurrent`	$21.39M	USD	Point-in-time
Preferred stock, shares outstanding	`PreferredStockSharesOutstanding`	0.00	shares	Point-in-time
Inventories	`InventoryNet`	$34.52M	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Common stock, par value (in dollars per share)	`CommonStockParOrStatedValuePerShare`	$0.00	USD	Point-in-time
Inventories	`InventoryNet`	$39.66M	USD	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Common stock, shares authorized	`CommonStockSharesAuthorized`	47.00M	shares	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$2.27M	USD	Point-in-time
Inventories-delivered systems	`InventoriesDeliveredSystems`	$6.90M	USD	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	23.25M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$10.52M	USD	Point-in-time
Common stock, shares issued	`CommonStockSharesIssued`	23.54M	shares	Point-in-time
Prepaid expenses and other	`PrepaidExpenseAndOtherAssetsCurrent`	$7.49M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$14.52M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	23.25M	shares	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetCurrent`	$8.59M	USD	Point-in-time
Common stock, shares outstanding	`CommonStockSharesOutstanding`	23.54M	shares	Point-in-time
Total current assets	`AssetsCurrent`	$189.31M	USD	Point-in-time
Total current assets	`AssetsCurrent`	$190.75M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$47.44M	USD	Point-in-time
Property, plant and equipment, net	`PropertyPlantAndEquipmentNet`	$43.21M	USD	Point-in-time
Goodwill	`Goodwill`	$11.74M	USD	Point-in-time
Goodwill	`Goodwill`	$11.35M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$7.86M	USD	Point-in-time
Intangible assets, net	`IntangibleAssetsNetExcludingGoodwill`	$10.98M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$4.34M	USD	Point-in-time
Deferred income tax assets	`DeferredTaxAssetsNetNoncurrent`	$3.67M	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$696.00K	USD	Point-in-time
Other assets	`OtherAssetsNoncurrent`	$924.00K	USD	Point-in-time
Total assets	`Assets`	$259.45M	USD	Point-in-time
Total assets	`Assets`	$262.83M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$6.40M	USD	Point-in-time
Accounts payable	`AccountsPayableCurrent`	$10.66M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$7.85M	USD	Point-in-time
Accrued payroll and related expenses	`EmployeeRelatedLiabilitiesCurrent`	$6.67M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$21.75M	USD	Point-in-time
Deferred revenue	`DeferredRevenueCurrent`	$8.48M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$7.82M	USD	Point-in-time
Other current liabilities	`OtherLiabilitiesCurrent`	$7.94M	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$424.00K	USD	Point-in-time
Income taxes payable	`AccruedIncomeTaxesCurrent`	$758.00K	USD	Point-in-time
Current portion of debt obligations	`LongTermDebtCurrent`	$928.00K	USD	Point-in-time
Current portion of debt obligations	`LongTermDebtCurrent`	-	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$48.96M	USD	Point-in-time
Total current liabilities	`LiabilitiesCurrent`	$30.73M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$4.31M	USD	Point-in-time
Deferred revenue	`DeferredRevenueNoncurrent`	$3.72M	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$1.17M	USD	Point-in-time
Income taxes payable	`TaxesPayableCurrent`	$2.13M	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$1.61M	USD	Point-in-time
Other long-term liabilities	`OtherLiabilitiesNoncurrent`	$2.14M	USD	Point-in-time
Debt obligations	`LongTermDebtNoncurrent`	-	USD	Point-in-time
Debt obligations	`LongTermDebtNoncurrent`	$4.37M	USD	Point-in-time
Total liabilities	`Liabilities`	$55.46M	USD	Point-in-time
Total liabilities	`Liabilities`	$43.68M	USD	Point-in-time
Commitments and contingencies (Note 13)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Commitments and contingencies (Note 13)	`CommitmentsAndContingencies`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	`PreferredStockValue`	-	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized; 23,537,275 and 23,250,429, respectively, issued and outstanding	`CommonStockValue`	$23.00K	USD	Point-in-time
Common stock, $0.001 par value, 47,000,000 shares authorized; 23,537,275 and 23,250,429, respectively, issued and outstanding	`CommonStockValue`	$24.00K	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$238.33M	USD	Point-in-time
Additional paid-in capital	`AdditionalPaidInCapital`	$244.73M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-23.85M	USD	Point-in-time
Accumulated deficit	`RetainedEarningsAccumulatedDeficit`	$-38.00M	USD	Point-in-time
Accumulated other comprehensive income	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$612.00K	USD	Point-in-time
Accumulated other comprehensive income	`AccumulatedOtherComprehensiveIncomeLossNetOfTax`	$1.27M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$207.37M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$215.77M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$170.85M	USD	Point-in-time
Total stockholders equity	`StockholdersEquity`	$209.99M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$262.83M	USD	Point-in-time
Total liabilities and stockholders equity	`LiabilitiesAndStockholdersEquity`	$259.45M	USD	Point-in-time

Income Statement 82 line items

Line Item	Tag	Value	Unit	Period
Products	`SalesRevenueGoodsNet`	$107.40M	USD	Annual
Products	`SalesRevenueGoodsNet`	$194.77M	USD	Annual
Products	`SalesRevenueGoodsNet`	$143.83M	USD	Annual
Service	`SalesRevenueServicesNet`	$35.29M	USD	Annual
Service	`SalesRevenueServicesNet`	$39.05M	USD	Annual
Service	`SalesRevenueServicesNet`	$36.91M	USD	Annual
Total net revenues	`SalesRevenueNet`	$144.31M	USD	Annual
Total net revenues	`SalesRevenueNet`	$230.06M	USD	Annual
Total net revenues	`SalesRevenueNet`	$182.88M	USD	Annual
Cost of products	`CostOfGoodsSold`	$59.51M	USD	Annual
Cost of products	`CostOfGoodsSold`	$88.58M	USD	Annual
Cost of products	`CostOfGoodsSold`	$75.88M	USD	Annual
Cost of service	`CostOfServices`	$19.49M	USD	Annual
Cost of service	`CostOfServices`	$18.30M	USD	Annual
Cost of service	`CostOfServices`	$20.53M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.55M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$2.63M	USD	Annual
Amortization of intangible assets	`CostOfProductsAmortizationOfIntangibleAssets`	$1.08M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$98.95M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$107.96M	USD	Annual
Total costs of net revenues	`CostOfGoodsAndServicesSold`	$81.63M	USD	Annual
Gross profit	`GrossProfit`	$62.68M	USD	Annual
Gross profit	`GrossProfit`	$122.10M	USD	Annual
Gross profit	`GrossProfit`	$83.93M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$29.59M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$23.29M	USD	Annual
Research and development	`ResearchAndDevelopmentExpense`	$32.71M	USD	Annual
Selling	`SellingAndMarketingExpense`	$26.46M	USD	Annual
Selling	`SellingAndMarketingExpense`	$27.13M	USD	Annual
Selling	`SellingAndMarketingExpense`	$27.02M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$22.10M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$22.90M	USD	Annual
General and administrative	`GeneralAndAdministrativeExpense`	$21.63M	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$776.00K	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$701.00K	USD	Annual
Amortization of intangible assets	`AmortizationOfIntangibleAssets`	$625.00K	USD	Annual
Legal settlement	`GainLossRelatedToLitigationSettlement`	-	USD	Annual
Legal settlement	`GainLossRelatedToLitigationSettlement`	-	USD	Annual
Legal settlement	`GainLossRelatedToLitigationSettlement`	$-2.50M	USD	Annual
Restructuring charge	`RestructuringCharges`	-	USD	Annual
Restructuring charge	`RestructuringCharges`	$1.74M	USD	Annual
Restructuring charge	`RestructuringCharges`	$1.74M	USD	1 Quarter
Restructuring charge	`RestructuringCharges`	-	USD	Annual
Total operating expenses	`OperatingExpenses`	$78.45M	USD	Annual
Total operating expenses	`OperatingExpenses`	$76.33M	USD	Annual
Total operating expenses	`OperatingExpenses`	$84.39M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$5.48M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$45.77M	USD	Annual
Income (loss) from operations	`OperatingIncomeLoss`	$-21.71M	USD	Annual
Interest income	`InvestmentIncomeInterest`	$133.00K	USD	Annual
Interest income	`InvestmentIncomeInterest`	$220.00K	USD	Annual
Interest income	`InvestmentIncomeInterest`	$62.00K	USD	Annual
Interest expense	`InterestExpense`	$1.34M	USD	Annual
Interest expense	`InterestExpense`	$651.00K	USD	Annual
Interest expense	`InterestExpense`	$1.04M	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$-66.00K	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$-1.27M	USD	Annual
Other income (expense), net	`OtherNonoperatingIncomeExpense`	$48.00K	USD	Annual
Total other expense, net	`OtherIncomeExpenseNet`	$-859.00K	USD	Annual
Total other expense, net	`OtherIncomeExpenseNet`	$-1.18M	USD	Annual
Total other expense, net	`OtherIncomeExpenseNet`	$-1.86M	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$4.62M	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$44.58M	USD	Annual
Income (loss) before income taxes	`IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments`	$-23.57M	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$15.90M	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$154.00K	USD	Annual
Provision for (benefit from) income taxes	`IncomeTaxExpenseBenefit`	$-9.42M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$-14.15M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$4.46M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$28.68M	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$0.19	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$1.26	USD	Annual
Basic (in dollars per share)	`EarningsPerShareBasic`	$-0.61	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$1.22	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$0.19	USD	Annual
Diluted (in dollars per share)	`EarningsPerShareDiluted`	$-0.61	USD	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.29M	shares	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	22.74M	shares	Annual
Basic (in shares)	`WeightedAverageNumberOfSharesOutstandingBasic`	23.36M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.29M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.84M	shares	Annual
Diluted (in shares)	`WeightedAverageNumberOfDilutedSharesOutstanding`	23.48M	shares	Annual

Cash Flow Statement 111 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-14.15M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$4.46M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$28.68M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$8.14M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$8.79M	USD	Annual
Depreciation and amortization	`DepreciationDepletionAndAmortization`	$4.98M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$4.47M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$7.67M	USD	Annual
Stock-based compensation	`ShareBasedCompensation`	$5.89M	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationOperatingActivities`	$3.92M	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationOperatingActivities`	$-53.00K	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationOperatingActivities`	$910.00K	USD	Annual
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-113.00K	USD	Annual
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-303.00K	USD	Annual
Loss on disposal of fixed assets	`GainLossOnDispositionOfAssets`	$-177.00K	USD	Annual
Inventory write down	`InventoryWriteDown`	$3.52M	USD	Annual
Inventory write down	`InventoryWriteDown`	$3.42M	USD	Annual
Inventory write down	`InventoryWriteDown`	$7.58M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$2.75M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$-6.89M	USD	Annual
Deferred income taxes	`DeferredIncomeTaxesAndTaxCredits`	$3.77M	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$1.32M	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$413.00K	USD	Annual
Changes in fair value of contingent payments to Zygo Corporation	`ChangesInFairValueOfContingentPayments`	$129.00K	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$-16.17M	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$10.38M	USD	Annual
Accounts receivable	`IncreaseDecreaseInAccountsReceivable`	$-7.73M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$7.02M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$12.17M	USD	Annual
Inventories	`IncreaseDecreaseInInventories`	$-1.38M	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$-446.00K	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$758.00K	USD	Annual
Inventories-delivered systems	`IncreaseDecreaseInventoriesDeliveredSystems`	$4.63M	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$4.75M	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$-1.11M	USD	Annual
Prepaid expenses and other	`IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets`	$1.85M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$4.24M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$-12.57M	USD	Annual
Accounts payable, accrued and other liabilities	`IncreaseDecreaseInAccountsPayableAndAccruedLiabilities`	$4.84M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$2.47M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$3.09M	USD	Annual
Deferred revenue	`IncreaseDecreaseInDeferredRevenue`	$12.72M	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$5.05M	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$-666.00K	USD	Annual
Income taxes payable	`IncreaseDecreaseInAccruedIncomeTaxesPayable`	$346.00K	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivities`	$54.03M	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivities`	$-2.43M	USD	Annual
Net cash provided by (used in) operating activities	`NetCashProvidedByUsedInOperatingActivities`	$24.01M	USD	Annual
Escrow payment received related to Nanda acquisition	`ProceedsFromEscrowRelatedToAcquisition`	$508.00K	USD	Annual
Escrow payment received related to Nanda acquisition	`ProceedsFromEscrowRelatedToAcquisition`	-	USD	Annual
Escrow payment received related to Nanda acquisition	`ProceedsFromEscrowRelatedToAcquisition`	-	USD	Annual
Purchase of Nanda's net assets, net of cash received	`PaymentsToAcquireBusinessesNetOfCashAcquired`	$23.91M	USD	Annual
Purchase of Nanda's net assets, net of cash received	`PaymentsToAcquireBusinessesNetOfCashAcquired`	-	USD	Annual
Purchase of Nanda's net assets, net of cash received	`PaymentsToAcquireBusinessesNetOfCashAcquired`	-	USD	Annual
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	-	USD	Annual
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	$3.00M	USD	Annual
Sales of marketable securities	`ProceedsFromSaleOfAvailableForSaleSecuritiesDebt`	-	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	-	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$8.34M	USD	Annual
Maturities of marketable securities	`ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities`	$47.09M	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$49.18M	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	-	USD	Annual
Purchases of marketable securities	`PaymentsToAcquireMarketableSecurities`	$58.65M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$4.99M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$5.69M	USD	Annual
Purchases of property, plant and equipment	`PaymentsToAcquirePropertyPlantAndEquipment`	$2.75M	USD	Annual
Net cash used in investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-26.67M	USD	Annual
Net cash used in investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-51.79M	USD	Annual
Net cash used in investing activities	`NetCashProvidedByUsedInInvestingActivities`	$-7.78M	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$300.00K	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$1.00M	USD	Annual
Payments to Zygo Corporation related to acquisition	`PaymentsOfMergerRelatedCostsFinancingActivities`	$432.00K	USD	Annual
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$5.22M	USD	Annual
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$2.21M	USD	Annual
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$4.80M	USD	Point-in-time
Repayments of debt obligations	`RepaymentsOfLongTermDebt`	$2.57M	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$3.91M	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$4.97M	USD	Annual
Proceeds from sale of shares under employee stock option plans and purchase plan	`ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions`	$7.19M	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationFinancingActivities`	$910.00K	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationFinancingActivities`	$-53.00K	USD	Annual
Excess tax benefit from equity awards	`ExcessTaxBenefitFromShareBasedCompensationFinancingActivities`	$3.92M	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$126.00K	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$618.00K	USD	Annual
Taxes paid on net issuance of stock awards	`PaymentsRelatedToTaxWithholdingForShareBasedCompensation`	$1.18M	USD	Annual
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	$4.26M	USD	Annual
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	$5.00M	USD	Annual
Repurchases of common stock	`PaymentsForRepurchaseOfCommonStock`	$8.50M	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivities`	$3.71M	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivities`	$-6.81M	USD	Annual
Net cash provided by (used in) financing activities	`NetCashProvidedByUsedInFinancingActivities`	$-7.50M	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-190.00K	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$163.00K	USD	Annual
Effect of exchange rate changes on cash and cash equivalents	`EffectOfExchangeRateOnCashAndCashEquivalents`	$-442.00K	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-34.78M	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$31.24M	USD	Annual
Net increase (decrease) in cash and cash equivalents	`CashAndCashEquivalentsPeriodIncreaseDecrease`	$-18.15M	USD	Annual
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$97.70M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$66.46M	USD	Point-in-time
Cash and cash equivalents, beginning of period	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$44.77M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$97.70M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$66.46M	USD	Point-in-time
Cash and cash equivalents, end of period	`CashAndCashEquivalentsAtCarryingValue`	$62.91M	USD	Point-in-time
Cash paid for interest	`InterestPaid`	$757.00K	USD	Annual
Cash paid for interest	`InterestPaid`	$522.00K	USD	Annual
Cash paid for interest	`InterestPaid`	$232.00K	USD	Annual
Cash paid for income taxes	`IncomeTaxesPaid`	$11.15M	USD	Annual
Cash paid for income taxes	`IncomeTaxesPaid`	$5.11M	USD	Annual
Cash paid for income taxes	`IncomeTaxesPaid`	$313.00K	USD	Annual

Stockholders Equity 34 line items

Line Item	Tag	Value	Unit	Period
Beginning Balance Value	`StockholdersEquity`	$207.37M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$215.77M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$170.85M	USD	Point-in-time
Beginning Balance Value	`StockholdersEquity`	$209.99M	USD	Point-in-time
Beginning Balance Shares	`CommonStockSharesIssued`	23.25M	shares	Point-in-time
Beginning Balance Shares	`CommonStockSharesIssued`	23.54M	shares	Point-in-time
Net income (loss)	`NetIncomeLoss`	$-14.15M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$4.46M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$28.68M	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$39.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$-151.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$11.00K	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-818.00K	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-484.00K	USD	Annual
Foreign currency translation adjustments	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-264.00K	USD	Annual
Unrealized gain (loss) on investments, net of tax	`OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax`	$-2.00K	USD	Annual
Unrealized gain (loss) on investments, net of tax	`OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax`	$7.00K	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$4.21M	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$10.77M	USD	Annual
Issuance of common stock under stock-based compensation plans	`StockIssuedDuringPeriodValueShareBasedCompensation`	$3.73M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$5.89M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$4.47M	USD	Annual
Stock-based compensation expense	`AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue`	$7.67M	USD	Annual
Repurchases and retirement of common stock	`StockRepurchasedAndRetiredDuringPeriodValue`	$4.26M	USD	Annual
Repurchases and retirement of common stock	`StockRepurchasedAndRetiredDuringPeriodValue`	$8.50M	USD	Annual
Repurchases and retirement of common stock	`StockRepurchasedAndRetiredDuringPeriodValue`	$5.00M	USD	Annual
Repurchases and retirement of common stock, Shares	`StockRepurchasedAndRetiredDuringPeriodShares`	332,771.00	shares	Annual
Repurchases and retirement of common stock, Shares	`StockRepurchasedAndRetiredDuringPeriodShares`	587,766.00	shares	Annual
Ending Balance Value	`StockholdersEquity`	$207.37M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$215.77M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$170.85M	USD	Point-in-time
Ending Balance Value	`StockholdersEquity`	$209.99M	USD	Point-in-time
Ending Balance Shares	`CommonStockSharesIssued`	23.25M	shares	Point-in-time
Ending Balance Shares	`CommonStockSharesIssued`	23.54M	shares	Point-in-time

Comprehensive Income 18 line items

Line Item	Tag	Value	Unit	Period
Net income (loss)	`NetIncomeLoss`	$-14.15M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$4.46M	USD	Annual
Net income (loss)	`NetIncomeLoss`	$28.68M	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-818.00K	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-484.00K	USD	Annual
Change in foreign currency translation adjustment	`OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax`	$-264.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$39.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$-151.00K	USD	Annual
Employee benefit plan adjustment	`OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax`	$11.00K	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	-	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$7.00K	USD	Annual
Net change on unrealized gains (losses) on available-for-sale investments	`OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax`	$-2.00K	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-277.00K	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-660.00K	USD	Annual
Other comprehensive loss	`OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent`	$-523.00K	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$-14.81M	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$4.19M	USD	Annual
Comprehensive income (loss)	`ComprehensiveIncomeNetOfTax`	$28.16M	USD	Annual

Data is extracted from SEC EDGAR XBRL filings. Values shown are as reported in the filing.